We produced Aluminum Nitride Ceramic Equipment Slotted Disc for semiconductor manufacturing.

The process of manufacturing semiconductors includes a harsh environment where plasma is generated. Therefore, the Aluminum Nitride(AlN) ceramic with excellent plasma resistance are more suitable for semiconductor manufacturing. What's more, in the fabrication of semiconductors, a combination of volatile precursor gases, plasma and high temperatures are used to lay high quality films onto the wafers. Deposition chambers and wafer handling tools require durable ceramic components to withstand these challenging environments, so the Aluminum Nitride Ceramic Slotted Disc is suitable for the semiconductor industry.